A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor with Temperature Compensation

Wei Xu, Shenhui Ma, Xiaoyi Wang, Yi Chiu, Yi Kuen Lee*

*Corresponding author for this work

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

In this paper, we propose a new 1D thermoresistive micro calorimetric flow (TMCF) sensor model for moist airflow with the temperature-dependent thermophysical properties. The 1D model and the corresponding proposed equivalent circuit model enable rapid design optimization of an ambient temperature-compensated TMCF (T2MCF) sensor integrated with the interface circuit by using a commercial 0.35-μ m 2P4M CMOS MEMS technology. The fabricated sensor shows a prominent sensitivity of 0.543 V/(m/s) and a low power consumption of less than 2.8 mW. Moreover, in comparison with the large drifting of 49% for the uncompensated TMCF sensor, the T2MCF sensor's output has an ultralow drifting of 0.5% with the ambient temperature variation of 22°C48°C. Therefore, this robust T2MCF sensor can be a promising Internet of Things (IoT) for smart energy-efficient buildings. [2018-0241].

Original languageEnglish
Article number8770247
Pages (from-to)841-849
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume28
Issue number5
DOIs
StatePublished - Oct 2019

Keywords

  • 1D model
  • ambient temperature compensation
  • CMOS MEMS
  • equivalent circuit model
  • Micro calorimetric flow sensors
  • thermoresistive

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