A broadband and scalable on-chip inductor model appropriate for operation modes of varying substrate resistivities

Jyh-Chyurn Guo*, T. Y. Tan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

A broadband and scalable model is developed to accurately simulate on-chip inductors of various dimensions and substrate resistivities. The broadband accuracy is proven over frequencies up to 20 GHz, even beyond resonance. A new scheme of RLC networks is deployed for spiral coils and substrate to account for 3D eddy current, substrate return path, and spiral coil to substrate coupling effects, etc. The 3D eddy current is identified as the key element essential to accurately simulate broadband characteristics. EM simulation using ADS momentum is conducted to predict the on-chip inductor performance corresponding to wide range of substrate resistivities (ρSi=0.05-1Kω-cm). Three operation modes such as TEM, slow-wave, and eddy current are reproduced. The model parameters manifest themselves physics-base through relevant correlation with ρSi over three operation modes. The onset of slow-wave mode can be consistently explained by a key element (RP) introduced in our model, which accounts for the conductor loss due to eddy current arising from magnetic field coupling through substrate return path. This broadband and scalable model is useful for RF circuit simulation. Besides, it can facilitate optimization design of on-chip inductors through physics-based model parameters relevant to varying substrate resistivities.

Original languageEnglish
Title of host publication2006 IEEE Radio Frequency Integrated Circuits(RFIC) Symposium - Digest of Papers
Pages486-489
Number of pages4
DOIs
StatePublished - 1 Dec 2006
Event2006 IEEE Radio Frequency Integrated Circuits Symposium - San Francisco, CA, United States
Duration: 11 Jun 200613 Jun 2006

Publication series

NameDigest of Papers - IEEE Radio Frequency Integrated Circuits Symposium
Volume2006
ISSN (Print)1529-2517

Conference

Conference2006 IEEE Radio Frequency Integrated Circuits Symposium
CountryUnited States
CitySan Francisco, CA
Period11/06/0613/06/06

Keywords

  • Broadband
  • Eddy current
  • Inductor
  • Scalable

Fingerprint Dive into the research topics of 'A broadband and scalable on-chip inductor model appropriate for operation modes of varying substrate resistivities'. Together they form a unique fingerprint.

Cite this