A 3.3V 15.6b 6.1pJ/0.02%RH with 10ms response humidity sensor for respiratory monitoring

Kelvin Yi Tse Lai, Yu Tao Yang, Bang Jing Chen, Chun Jen Shen, Ming Feng Shiu, Zih Cheng He, Hsie Chia Chang, Chen Yi Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

Abstract

An event-driven and energy-efficient humidity sensor for environment detection and healthcare monitoring is presented. A differential CMOS-MEMS humidity device and proportion-based capacitance-to-digit readout circuit are proposed to overcome PVT variations, and in the meantime to improve sensitivity, response time, and conversion energy. This chip achieves 15.6b 20-90 %RH at 1KS/s, 6.1pJ per 0.02%RH of sensitivity, and 10ms fast response time in TSMC 0.35-μm CMOS MEMS process. With variations in temperature and voltage, our proposal can minimize the errors from 40%RH to 0.2%RH and 50%RH to 0.1%RH, making it very suitable for wearable respiratory monitoring.

Original languageEnglish
Title of host publication2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages293-296
Number of pages4
ISBN (Electronic)9781479940905
DOIs
StatePublished - 13 Jan 2015
Event2014 10th IEEE Asian Solid-State Circuits Conference, A-SSCC 2014 - Kaohsiung, Taiwan
Duration: 10 Nov 201412 Nov 2014

Publication series

Name2014 IEEE Asian Solid-State Circuits Conference, A-SSCC - Proceedings of Technical Papers

Conference

Conference2014 10th IEEE Asian Solid-State Circuits Conference, A-SSCC 2014
CountryTaiwan
CityKaohsiung
Period10/11/1412/11/14

Keywords

  • Capacitive Sensing
  • Health-Care
  • Humidity Sensor
  • Low Energy
  • Low Power
  • Respiratory Monitoring

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