60nm planarized ultra-thin body solid phase epitaxy MOSFETs

Peiqi Xuan*, Jakub Kedzierski, Vivek Subranmanian, Jeffrey Bokor, Tsu Jae King, Chen-Ming Hu

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

6 Scopus citations

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Engineering & Materials Science