60nm planarized ultra-thin body solid phase epitaxy MOSFETs

Peiqi Xuan*, Jakub Kedzierski, Vivek Subranmanian, Jeffrey Bokor, Tsu Jae King, Chen-Ming Hu

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

6 Scopus citations


Several 60nm planarized SPEFETs with excellent performance are presented and presented. For demonstration purposes, the characterization of both one side and two sides crystallization on the channel film is discussed.

Original languageEnglish
Number of pages2
StatePublished - 1 Jan 2000
Event58th Device Research Conference (58th DRC) - Denver, CO, USA
Duration: 19 Jun 200021 Jun 2000


Conference58th Device Research Conference (58th DRC)
CityDenver, CO, USA

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