Several 60nm planarized SPEFETs with excellent performance are presented and presented. For demonstration purposes, the characterization of both one side and two sides crystallization on the channel film is discussed.
|Number of pages||2|
|State||Published - 1 Jan 2000|
|Event||58th Device Research Conference (58th DRC) - Denver, CO, USA|
Duration: 19 Jun 2000 → 21 Jun 2000
|Conference||58th Device Research Conference (58th DRC)|
|City||Denver, CO, USA|
|Period||19/06/00 → 21/06/00|