40-GHz coplanar waveguide bandpass filters on silicon substrate

K. T. Chan*, C. Y. Chen, Albert Chin, J. C. Hsieh, J. Liu, T. S. Duh, W. J. Lin

*Corresponding author for this work

Research output: Contribution to journalArticle

42 Scopus citations


We report a very simple process to fabricate high performance filter on Si at 40 GHz using proton implantation. The filter has only -3.4-dB loss at peak transmission of 40 GHz with a broad 9-GHz bandwidth. In sharp contrast, the filter on 1.5-μm SiO2 isolated Si has much worse transmission and reflection loss. This is the first demonstration of high performance filter at millimeter-wave regime on Si with process compatible to current VLSI technology.

Original languageEnglish
Pages (from-to)429-431
Number of pages3
JournalIEEE Microwave and Wireless Components Letters
Issue number11
StatePublished - 1 Nov 2002

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