3D Monte-Carlo model of deposition and grain growth in thin films

I. V. Sobchenko*, A. M. Gusak, King-Ning Tu

*Corresponding author for this work

Research output: Contribution to journalArticle

1 Scopus citations


To understand the cause of linear rate of grain growth under thin film deposition we have developed a 3D kinetic Monte-Carlo model which takes into account deposition of adatoms and their diffusion on a substrate, nucleation and growth of grains, migration of grainboundaries, surface diffusion at the "top" grain surface. Our simulation proves that the lateral grain growth under deposition is close to linear time law, which agrees with the experiment.

Original languageEnglish
Pages (from-to)1281-1286
Number of pages6
JournalDefect and Diffusion Forum
Issue numberPART 2
StatePublished - 1 Jan 2005


  • Diffusion
  • Flux-Driven Grain Growth
  • Monte-Carlo Modeling
  • Nucleaticn
  • Thin Film Deposition

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