To understand the cause of linear rate of grain growth under thin film deposition we have developed a 3D kinetic Monte-Carlo model which takes into account deposition of adatoms and their diffusion on a substrate, nucleation and growth of grains, migration of grainboundaries, surface diffusion at the "top" grain surface. Our simulation proves that the lateral grain growth under deposition is close to linear time law, which agrees with the experiment.
|Number of pages||6|
|Journal||Defect and Diffusion Forum|
|Issue number||PART 2|
|State||Published - 1 Jan 2005|
- Flux-Driven Grain Growth
- Monte-Carlo Modeling
- Thin Film Deposition