3D integration technology-introduction and overview

Chuan Seng Tan*, Steven J. Koester, Kuan Neng Chen

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publication3D Integration for VLSI Systems
PublisherPan Stanford Publishing Pte. Ltd.
Number of pages25
ISBN (Electronic)9789814303828
ISBN (Print)9789814303811
StatePublished - 19 Apr 2016

Cite this

Tan, C. S., Koester, S. J., & Chen, K. N. (2016). 3D integration technology-introduction and overview. In 3D Integration for VLSI Systems (pp. 2-26). Pan Stanford Publishing Pte. Ltd.. https://doi.org/10.4032/9789814303828