3D integration technology - Introduction and overview

Chuan Seng Tan*, Steven J. Koester, Kuan-Neng Chen

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Scopus citations
Original languageEnglish
Title of host publication3D Integration for VLSI Systems
PublisherPan Stanford Publishing Pte. Ltd.
Pages1-26
Number of pages26
ISBN (Print)9789814303811
DOIs
StatePublished - 30 Sep 2011

Cite this

Tan, C. S., Koester, S. J., & Chen, K-N. (2011). 3D integration technology - Introduction and overview. In 3D Integration for VLSI Systems (pp. 1-26). Pan Stanford Publishing Pte. Ltd.. https://doi.org/10.4032/9789814303828