2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage

T. Chu Duc, Gih Keong Lau, J. Wei, P. M. Sarro

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

This paper presents a novel 2D electro-thermal microgripper based on integrated silicon-polymer laterally stacked forward actuators. Displacements up to 8 and 13 μm along x-axis and y-axis at 2 V are measured. The microgripper is capable of rotating the clamped object both clockwise and counter-clockwise. Maximum average working temperature is 160°C.

Original languageEnglish
Title of host publicationProceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages687-690
Number of pages4
DOIs
StatePublished - 1 Dec 2007
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: 21 Jan 200725 Jan 2007

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
CountryJapan
CityKobe
Period21/01/0725/01/07

Keywords

  • 2d microgripper
  • Constrained polymer
  • Electro-thermal actuator
  • Forward actuator

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