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A Study on The Porogen and Pore Size/Distribution and Aggregation Behavior in Spin-On Porous Ultra-lLw K Dielectrics Modified by Ionic Surfactants
呂, 志鵬
(PI)
Department of Materials Science and Engineering
Overview
Project Details
Status
Finished
Effective start/end date
1/08/13
→
31/10/14
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