1990 …2022

Research output per year

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Research Output

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Conference article
1996

Conducting poly(aniline-co-N-propanesulfonic acid aniline) (PAPSAH) as charge dissipation layer for e-beam lithography

Shy, S. L., Chao, T-S., Lei, T. F., Chen, S. A., Loong, W. A. & Chang, C. Y., 1 Dec 1996, In : Proceedings of SPIE - The International Society for Optical Engineering. 2884, p. 454-465 12 p.

Research output: Contribution to journalConference article

1 Scopus citations

Mix-and-match lithography processes for 0.1 μm MOS transistor device fabrication

Yew, J. Y., Chen, L. J., Nakamura, K., Chao, T-S. & Lin, H-C., 1 Dec 1996, In : Proceedings of SPIE - The International Society for Optical Engineering. 2723, p. 180-188 9 p.

Research output: Contribution to journalConference article

1 Scopus citations
1997

Performance and reliability evaluations of p-channel flash memories with different programming schemes

Chung, S. S., Kuo, S. N., Yih, C. M. & Chao, T-S., 1 Dec 1997, In : Technical Digest - International Electron Devices Meeting, IEDM. p. 295-298 4 p.

Research output: Contribution to journalConference article

17 Scopus citations
1998

Characterization of plasma charging damage in ultrathin gate oxides

Lin, H-C., Wang, M. F., Chen, C. C., Hsien, S. K., Chien, C-H., Huang, T. Y., Chang, C. Y. & Chao, T-S., 1 Jan 1998, In : Annual Proceedings - Reliability Physics (Symposium). p. 312-317 6 p.

Research output: Contribution to journalConference article

12 Scopus citations

Voltage scaling and temperature effects on drain leakage current degradation in a hot carrier stressed n-MOSFET

Wang, T-H., Hsu, C. F., Chiang, L. P., Zous, N. K., Chao, T-S. & Chang, C. Y., 1 Jan 1998, In : Annual Proceedings - Reliability Physics (Symposium). p. 209-213 5 p.

Research output: Contribution to journalConference article

3 Scopus citations
1999

Effects of plasma treatments, substrate types, and crystallization methods on performance and reliability of low temperature polysilicon TFTs

Lin, C. W., Yang, M. Z., Yeh, C. C., Cheng, L. J., Huang, T. Y., Cheng, H-C., Lin, H-C., Chao, T-S. & Chang, C. Y., 1 Dec 1999, In : Technical Digest - International Electron Devices Meeting. p. 305-308 4 p.

Research output: Contribution to journalConference article

21 Scopus citations
1 Scopus citations

Novel Bi-directional tunneling program/erase NOR (BiNOR) type flash EEPROM

Yang, E. C. S., Liu, C. J., Chao, T-S., Liaw, M. C. & Hsu, C. C. H., 1 Jan 1999, In : International Symposium on VLSI Technology, Systems, and Applications, Proceedings. p. 207-210 4 p.

Research output: Contribution to journalConference article

Novel di-directional tunneling NOR (BiNOR) type 3-D flash memory cell

Yang, E. C. S., Liu, C. J., Chao, T-S., Liaw, M. C. & Hsu, C. C. H., 1 Dec 1999, In : Digest of Technical Papers - Symposium on VLSI Technology. p. 85-86 2 p.

Research output: Contribution to journalConference article

3 Scopus citations
2001

A new parallel adaptive finite volume method for the numerical simulation of semiconductor devices

Li, Y-M., Liu, J. L., Chao, T. S. & Sze, S. M., 15 Dec 2001, In : Computer Physics Communications. 142, 1-3, p. 285-289 5 p.

Research output: Contribution to journalConference article

25 Scopus citations
2004

Characterization of interfacial layer of ultrathin Zr silicate on Si(100) using spectroscopic ellipsometry and HRTEM

Ahn, H. Y., Chen, H. W., Landheer, D., Wu, X., Chou, L. J. & Chao, T-S., 1 May 2004, In : Thin Solid Films. 455-456, p. 318-322 5 p.

Research output: Contribution to journalConference article

20 Scopus citations

NBTI effects of pMOSFETs with different nitrogen dose implantation

Lee, Y. J., Tang, Y. C., Wu, M. H., Chao, T-S., Ho, P. T., Lai, D., Yang, W. L. & Huang, T. Y., 1 Jan 2004, In : IEEE International Reliability Physics Symposium Proceedings. 2004-January, January, p. 681-682 2 p., 1315449.

Research output: Contribution to journalConference article

1 Scopus citations

Nitrogen distribution and oxidation of HfOxNy gate dielectrics deposited by MOCVD using [(C2H5) 2N]4Hf with NO and O2

Lee, M., Landheer, D., Wu, X., Couillard, M., Lu, Z., Ng, W. T., Chen, J., Chao, T-S. & Lei, T., 1 Dec 2004, In : Materials Research Society Symposium Proceedings. 811, p. 211-216 6 p.

Research output: Contribution to journalConference article

2015

A novel junctionless FinFET structure with sub-5nm shell doping profile by molecular monolayer doping and microwave annealing

Lee, Y. J., Cho, T. C., Kao, K. H., Sung, P. J., Hsueh, F. K., Huang, P. C., Wu, C. T., Hsu, S. H., Huang, W. H., Chen, H. C., Li, Y., Current, M. I., Hengstebeck, B., Marino, J., Büyüklimanli, T., Shieh, J. M., Chao, T. S., Wu, W. F. & Yeh, W. K., 20 Feb 2015, In : Technical Digest - International Electron Devices Meeting, IEDM. 2015-February, February, p. 32.7.1-32.7.4 7047158.

Research output: Contribution to journalConference article

21 Scopus citations