X-ray Photoelectron and Auger Electron Epectroscopy

Equipment/facility: Equipment

  • Location

    工程六館215室

    Taiwan

Equipments Details

Description

重要規格:
(1) XPS (ESCA):
X-ray光源: monochromatic X-ray source (Al Anode )
X光光束可設定範圍為200μm~900μm
(2) 能量分析儀器:180°球面扇狀分析器(SSA)
能量解析度Energy resolution:0.02~2.0%
能量解析度Energy resolution≦ 0.5eV at Ag 3d5/2 peak (Ag標準品)
能量解析度Energy resolution≦ 0.9eV at C 1s peak(PET標準品)
分析面積analysis area :20μm~8mm
(3)離子源:Argon ion gun
可提供兩種濺蝕模式Monatomic及Cluster,做樣品表面清潔與縱深分析。
離子束能量範圍:
Monatomic mode─500 eV to 3 keV
Cluster mode─2 keV to 7 keV
離子束尺寸範圍:
Monatomic mode─500 μm @ 3.0 μA and 3 keV
Cluster mode─100 atoms ~ 2000 atoms
(4) 單槍式雙射源電荷補償:同一支射源能同時以低能電子和離子進行雙射源(Dual beam)電荷補償。
(5) AES:場發射式電子槍
加速電壓:1 keV ~ 10 keV
SEM spatial resolution: 95 nm at 10 keV, 5.0 nA
(6)UPS (Ultraviolet Photoelectron Spectroscopy):
Ultra Violet source (He紫外光光源)
試片尺寸:5mm×5mm ~40mm×20mm
抽真空速率:~30分鐘
服務項目: (1) 表面定性分析(Survey Scan). (2)表面定量分析( Survey Scan). (3)XPS化學位移(chemical shift). (4) 縱深分析(Depth profiling). (5) 微區分析(Point). (6) 元素影像掃描(Mapping). (7) 紫外光光電子掃描(UPS). (8) REELS(Reflection Electron Energy Loss Spectroscopy)
Photo associated with equipment

Details

NameThermo Fisher Scientific,ESCALAB Xi+
Acquisition date1/11/04
ManufacturersThermo Fisher Scientific

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