Thermal Evaporation Coater

Equipment/facility: Equipment

  • Location

    固態電子系統大樓 3 樓實驗室

    Taiwan

Equipments Details

Description

功能: (1) 薄膜蒸鍍(主要用於鋁金屬之蒸鍍)

重要規格: (1) 抽氣系統:RP+擴散幫浦,最低壓力2.0E-6 Torr. (2) 基板大小:4吋晶片8片 或 6吋晶片5片. (3) 鍍膜均勻性:±5%以內 (4吋基板)
Photo associated with equipment

Details

NameULVAC EBX-6D
Acquisition date1/01/95
ManufacturersULVAC, Inc.

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