Scanning electron microscope and E-beam lithography

Equipment/facility: Equipment

  • Location

    基礎科學大樓(SC009室)

    Taiwan

Equipments Details

Description

重要規格:放大物品之影像與控制載台與電子束、儀器性能: (1) 電子源: 熱燈絲電子槍. (2) 操作電壓: 0.3 kV to 30 kV. (3) 解析度: 3.0 nm (30 kV) 15.0 nm (1.0 kV). (4) 放大倍率: ×5 到 ×300,000(依試片本身而定). (5) 探針電流: 1 pA to 1 μA. (6) 試片尺寸: 12mm x 12mm. (7) 最小線寬:50nm(PMMA)
四、服務項目:探索樣品形貌與電子束微影
Photo associated with equipment

Details

NameJSM IT-300
Acquisition date1/04/16
ManufacturersJEOL Ltd.