Polysilicon Reactive Ion Etching (Poly-Si RIE)

    Kuan-Neng Chen (Manager), 進章 胡 (Operator) & 正維 李 (Operator)

Equipment/facility: Equipment

  • Location

    固態電子系統大樓 1樓116實驗室

    Taiwan

Fingerprint

Explore the research areas in which this equipment has been used. These labels are generated based on the related outputs. Together they form a unique fingerprint.

Medicine & Life Sciences