Oxidation & Diffusion furnaces

Equipment/facility: Equipment

  • Location

    固態電子系統大樓 1樓 121實驗室

    Taiwan

Equipments Details

Description

重要規格:(1) 加熱最高溫度1100°C. (2) 加熱區長度36",爐管(chamber)口徑6". (3) 恆溫區30cm. (4) 0~1100°C加熱時間2小時
功能: (1) 磷的預置(POCl3 predeposition)
Photo associated with equipment

Details

Name交通大學半導體中心自行組裝
Acquisition date1/06/92
Manufacturers

National Chiao Tung University

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