High-Resolution Scanning Electron Microscope & Energy Dispersive Spectrometer

Equipment/facility: Equipment

  • Location

    電資大樓710室

    Taiwan

Equipments Details

Description

重要規格 : (1) 電子源:冷陰極電子槍. (2) 操作電壓:0.5kV~30kV. (3) 試片尺寸:25mm diameter x 10mm(t). (4) 解析度:15Å (at 15kV) or 25Å (at 1kV). (5) 放大倍率50萬倍(依試片本身而定). (6) 二次電子解析度1.5nm(15kV下)

服務項目:高倍率放大觀察元件、薄膜等微細結構或剖面結構.

Details

NameS-4700I
Acquisition date1/10/98
ManufacturersHitachi

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