Field Emission Scanning Electron Microscope

    Pu-Wei Wu (Manager), 正萱 朱 (Operator) & 伯寧 徐 (Operator)

Equipment/facility: Equipment

  • Location

    工程六館EF103

    Taiwan

Equipments Details

Description

重要規格:(1)電子槍 冷陰極型式(2)解析度 1.0 nm (15KV) 2.2 nm (1KV)(3)電子槍真空度 10-8 Pa以下(4)倍率 25至650,000倍(5)加速電壓 0.5 to 30 KV(6)探針電流 10-13 to 2×10-9 A(7)試片大小限制 直徑Φ25 mm × 高度10 mm(8)試片載台 中心式試片台、X-Y移動範圍:70 mm x 50 mm、旋轉範圍:360°、工作距離:1.5 mm to 25 mm、傾斜角度:-5° to +60°

服務項目:試片微觀結構觀察(SEM)、表面能階分析(EDS)

Details

NameJSM-6700F
Acquisition date1/12/05
ManufacturersJEOL Ltd.

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