E-beam inspection tool

Equipment/facility: Equipment

  • Location

    基礎科學大樓 SC030 室

    Taiwan

Equipments Details

Description

重要規格: (1) 所量測之樣本其缺陷檢測與尺度線寬大於20奈米. (2) 置於載台後的總高度不得大於或小於850微米

服務項目: (1) 樣本缺陷檢測. (2)樣本尺度量測. (3) 本設備應用範圍達奈米尺寸,可觀察材料範圍甚廣,極歡迎物理、化學、材料、電子、光電及生物等不同領域之專家學者,使用此機器從事相關研究,亦歡迎電機、機械、資訊、光學等領域學者對電子束之應用及功能提昇提出新的看法

Details

NameeScan310
Acquisition date1/03/12
ManufacturersHermes Microvision, Inc.

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