Dual E-Gun Evaporation System A

Institute of Electronics

Equipment/facility: Equipment

  • Location

    固態電子系統大樓 3 樓實驗室

    Taiwan

Equipments Details

Description

功能： (1) 可用於多層薄膜蒸鍍（限半導體製程常用之材料）

重要規格： (1) EB gun Model EGK-3M*2.5kw EB power 2台. (2) 抽氣系統：RP + Cryo pump U-10 pu(2300 L/S N2)，最低壓力2*10¯6Torr. (3) 基板大小：4吋晶片18片或 6吋晶片3片+ 4吋6片

Details

NameULVAC EBX-10C
Acquisition date1/05/93
ManufacturersULVAC, Inc.

Contact Information

NameYu-Ting Cheng
Phone林聖欽 先生 (TEL：03-5712121-55668、55608)
Emailsck1325@faculty.nctu.edu.tw
Web addressesWebsite, Booking/Management

Terms of loan/booking

Available for loan - internal and external

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