Dual E-Gun Evaporation B System

Institute of Electronics

Equipment/facility: Equipment

  • Location

    固態電子系統大樓 3 樓實驗室

    Taiwan

Equipments Details

Description

功能： (1) 薄膜蒸鍍（限半導體製程常用之材料）

重要規格： (1) EB gun Model EGL-35M * 5kw EB power. (2) Cryo pump U-10 pu(2300 L/S N2)，最低壓力3.0E-7 Torr. (3) 基板大小：4"、6"

Details

NameULVAC EBX-10C
Acquisition date1/05/93
ManufacturersULVAC, Inc.

Contact Information

NameYu-Ting Cheng
Phone倪月珍小姐 / 溫鋐明先生 (TEL：03-5712121-55669、55608)
Emailsycni@mail.nctu.edu.tw
Web addressesWebsite, Booking/Management

Terms of loan/booking

Available for loan - internal and external

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