Equipments Details
Description
功能：
乾式蝕刻，蝕刻碳化矽(SiC)材料，4" wafer為主。
重要規格：
本蝕刻系統可通入C4F8、O2、SF6、CHF3等氣體蝕刻碳化矽(SiC)等材料。
乾式蝕刻，蝕刻碳化矽(SiC)材料，4" wafer為主。
重要規格：
本蝕刻系統可通入C4F8、O2、SF6、CHF3等氣體蝕刻碳化矽(SiC)等材料。
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Details
| Name | SamCo RIE-400iP |
|---|---|
| Acquisition date | 4/03/19 |
| Manufacturers | Samco Inc. |
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