Dielectric Material RIE-400iP

    Bing-Yue Tsui (Manager), 進章 胡 (Operator) & 正維 李 (Operator)

Equipment/facility: Equipment

  • Location

    固態電子系統大樓 1樓121實驗室

    Taiwan

Equipments Details

Description

功能:
乾式蝕刻,蝕刻碳化矽(SiC)材料,4" wafer為主。

重要規格:
本蝕刻系統可通入C4F8、O2、SF6、CHF3等氣體蝕刻碳化矽(SiC)等材料。

Details

NameSamCo RIE-400iP
Acquisition date4/03/19
Manufacturers Samco Inc.

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