Cold Field Emission Scanning Electron Microscope (Hitachi SU8010) & Energy Dispersive Spectrometer

Equipment/facility: Equipment

  • Location

    工程六館2樓212室實驗室

    Taiwan

Equipments Details

Description

功能: (1) 電子顯微鏡觀察(SEM):高倍率放大觀察元件、薄膜等微細結構或剖面結構. (2) 表面能階分析(EDS):特定位置表面材料成分電子能階光譜分析,用以判斷表面材料或污染的組成. (3) 試片前處理:新購置離子研磨機,具有剖面研磨&表面研磨功能,協助讓試片表面更平整,便於SEM觀察重要規格: (1)電子源:冷陰極電子槍. (2)操作電壓:0.1kV~30kV. (3) 試片尺寸:50mm diameter x 50mm diameter. (4)解析度:10A° (at 15kV) or 13A° (at 1kV). (5)放大倍率20倍~80萬倍(依試片本身而定). (6) 二次電子解析度1.0nm(15kV下). (7) EDS可提供全能譜定性分析(Be4~U92)、半定量分析及元素分佈圖. (8)離子研磨機使用氣體:氬氣(Ar). (9) 剖面研磨範圍X:≥7mm Y: ≥3mm. (10) 表面研磨速度:0°:≥2μm/hr 60°:≥20μm/hr

Details

Name Hitachi SU-8010
Acquisition date1/10/13
ManufacturersHitachi

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